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30 October 1998 Scatterometer at Korea Research Institute of Standards and Science (KRISS) for bidirectional reflectance distribution function (BRDF)
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Abstract
A description is given of the scatterometer which has been developed at KRISS for BRDF and diffraction pattern measurement. Light source, goniometer, and receiver is described. As a light source, the collimated HeNe and argon ion laser is used, with which the wavelengths of 632.8, 514.5, and 488.0 nm are available. The goniometer has 6 degrees of freedom. The precision of scattering polar angle is enhanced by choosing long rotation arm (length: 1.2 meter) placed on the stepmotor-controlled rotary table whose angle is read by the angle encoder with the resolution of 0.0001 degree and accuracy 0.001 degree. The receiver has a wide dynamic range greater than 1014 in intensity without intensity attenuation and receiver aperture change, which is made by cascading three kinds of detectors: photodiode (PD), photo- multiplier in direct current mode (DC), and photo-multiplier in pulse counting mode (PC). The measured instrument signature and the sinusoidal grating BRDF at the wavelength of 488 nm is presented.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Byong Chon Park, Yun Woo Lee, and Beomhoan O "Scatterometer at Korea Research Institute of Standards and Science (KRISS) for bidirectional reflectance distribution function (BRDF)", Proc. SPIE 3426, Scattering and Surface Roughness II, (30 October 1998); https://doi.org/10.1117/12.328472
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