HECTOR: a trans-nanometer calibration artifact applied to end-to-end validation of an interferometric metrology facility

Alson E. Hatheway

doi:10.1117/12.328555

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29 October 1998 HECTOR: a trans-nanometer calibration artifact applied to end-to-end validation of an interferometric metrology facility

Alson E. Hatheway

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Proceedings Volume 3429, Current Developments in Optical Design and Engineering VII; (1998) https://doi.org/10.1117/12.328555
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

An electromagnetic Lorenz force transducer has been coupled to an Angstrom ^tm elastic transducer to form a new compound transducer in which the displacement output is proportional to the current input. It is called HECTOR and has been built in a form which provides very small displacements (in the range of nanometers) in response to modest currents (tens of milliamperes). The transduction effect is shown to be linear and hysteresis-free which provides for accurate calibration of the transducer and highly repeatable performance. HECTOR is intended to generate reliable and repeatable small displacements, smaller than may be obtained by the subdivision of the wavelength of light, for use in the calibration of metrology instruments which may be used in surface metrology, process control and research. This paper describes the operation of HECTOR and its use in the setup and validation of an interferometric metrology facility to be used to measure small displacements.

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Alson E. Hatheway "HECTOR: a trans-nanometer calibration artifact applied to end-to-end validation of an interferometric metrology facility", Proc. SPIE 3429, Current Developments in Optical Design and Engineering VII, (29 October 1998); https://doi.org/10.1117/12.328555

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