Paper
13 October 1998 New ultrahigh-sensitivity absolute, linear, and rotary encoders
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Abstract
Several new types of absolute optical encoders of both rotary and linear function are discussed. The means for encoding are complete departures from conventional optical encoders and offer advantages of reliability, compact form, immunity to damage-induced dropouts of position information, and about an order of magnitude higher sensitivity over what is commercially available. Rotary versions have sensitivity from 0.02 arcseconds down to 0.003 arcsecond while linear models have demonstrated sensitivity of 10 nm (0.01 micrometers ) with higher sensitivities possible.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Douglas B. Leviton "New ultrahigh-sensitivity absolute, linear, and rotary encoders", Proc. SPIE 3440, Photonics for Space Environments VI, (13 October 1998); https://doi.org/10.1117/12.326695
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Computer programming

Charge-coupled devices

Mirrors

Interferometers

Optical encoders

Prototyping

Diffraction gratings

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