Paper
13 November 1998 Metrology of a mirror at the Advanced Photon Source: comparison between optical and x-ray measurements
Lahsen Assoufid, Jonathan C. Lang, Jin Wang, George Srajer
Author Affiliations +
Abstract
This paper describes metrology of a vertically focusing mirror on the bending magnet beamline in sector-1 of the Advanced Photon Source, Argonne National Laboratory. The mirror was evaluated using measurements from both an optical long trace profiler and x-rays. Slope error profiles obtained with the two methods were compared and were found to be in a good agreement. Further comparisons were made between x-ray measurements and results from the SHADOW ray-tracing code.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lahsen Assoufid, Jonathan C. Lang, Jin Wang, and George Srajer "Metrology of a mirror at the Advanced Photon Source: comparison between optical and x-ray measurements", Proc. SPIE 3447, Advances in Mirror Technology for Synchrotron X-Ray and Laser Applications, (13 November 1998); https://doi.org/10.1117/12.331123
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Mirrors

X-rays

X-ray optics

Metrology

CCD cameras

Error analysis

Optical testing

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