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11 December 1998 Multilayer films for figured x-ray optics
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Abstract
High reflectance multilayer films can now be deposited onto figured substrate to make focusing X-ray mirrors. In this paper, I discuss a variety of topics associated with the development and further refinement of such X-ray optics: high- efficiency multilayer films for use near normal incidence in the 170 - 300 Angstrom region; depth-graded multilayer films for broad-band reflectance in the 10 - 100 keV region; surface roughness and it's effect on mirror performance; and finally stresses in multilayer films.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David L. Windt "Multilayer films for figured x-ray optics", Proc. SPIE 3448, Crystal and Multilayer Optics, (11 December 1998); https://doi.org/10.1117/12.332515
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