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11 December 1998 Use of Kirkpatrick-Baez multilayer optics for x-ray fluorescence imaging
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We discuss the possibilities for using Kirkpatrick-Baez (K-B) multilayer elements to directly image the fluorescence distribution from a specimen under x-ray illumination. X-ray fluorescence would be collected by K-B elements close to the specimen, with a magnified image formed at an area detector about 0.5 m away from the source. This is in contrast to the use of K-B optics to form a microprobe beam that is rastered across a surface while the x-ray fluorescence is recorded to form a fluorescent image. Tungsten-carbon multilayers on curved substrates have been fabricated at the Advanced Photon Source, and their focusing properties have been characterized by a laboratory x-ray source. Synchrotron applications would illuminate specimens with lithographic patterns, for example, with the image being formed at an x-ray CCD camera. The ability to form an x-ray fluorescent image, and therefore a map of the specimen's elemental distribution near the surface, could provide a useful analytical tool without the usual need for a microfocusing beam. Furthermore, there are interesting possibilities offered by combining fluorescence imaging with x-ray near edge absorption spectroscopy (XANES), extended x- ray absorption spectroscopy (EXAFS), and x-ray standing waves.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alex Bakulin, Stephen M. Durbin, Chian Liu, Jenny Erdmann, Albert T. Macrander, and Terrence Jach "Use of Kirkpatrick-Baez multilayer optics for x-ray fluorescence imaging", Proc. SPIE 3448, Crystal and Multilayer Optics, (11 December 1998);


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