Experimental and theoretical performances of an implanted lamellar multilayer grating

Hughes Trambly; Frederic Montiel; Michel Neviere; Bernard Vidal

doi:10.1117/12.330347

6 November 1998 Experimental and theoretical performances of an implanted lamellar multilayer grating

Hughes Trambly, Frederic Montiel, Michel Neviere, Bernard Vidal

Proceedings Volume 3449, X-Ray Microfocusing: Applications and Techniques; (1998) https://doi.org/10.1117/12.330347
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

This paper reports on recent developments on lamellar multilayer gratings fabricated by ions implantation. Comparative investigations between conventional etched multilayer grating and implanted ones are made and outline the potentialities of the original process of fabrication. In addition, simulations were carried for different types of Cu K(alpha) ₁ x-ray measurements by using a rigorous theory of diffraction recently revised. The quality of the fits obtained with this method easily applicable to the implanted multilayer grating appears as an essential tool in the improvement of x-ray diffractive optics fabrication processes.

Citation Download Citation

Hughes Trambly, Frederic Montiel, Michel Neviere, and Bernard Vidal "Experimental and theoretical performances of an implanted lamellar multilayer grating", Proc. SPIE 3449, X-Ray Microfocusing: Applications and Techniques, (6 November 1998); https://doi.org/10.1117/12.330347

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available