New simultaneous initialization and online phase calculation in ESPI displacement measurement

Harald Friebe

doi:10.1117/12.312953

30 June 1998 New simultaneous initialization and online phase calculation in ESPI displacement measurement

Harald Friebe

Proceedings Volume 3478, Laser Interferometry IX: Techniques and Analysis; (1998) https://doi.org/10.1117/12.312953
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

A new in-plane ESPI displacement sensor will be proposed.It is suitable for high frequent 1D displacement measurement with high accuracy. For this measurement an on-line phase calculation is used. This technique is based on a standard phase shift algorithm and leads to the 1D displacement of one object point. Introducing a new simultaneous initialization the decorrelation limit of the present speckle measurement will be exceeded. This will realize a continuous displacement measurement.

Citation Download Citation

Harald Friebe "New simultaneous initialization and online phase calculation in ESPI displacement measurement", Proc. SPIE 3478, Laser Interferometry IX: Techniques and Analysis, (30 June 1998); https://doi.org/10.1117/12.312953

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