Interferometer system scheme for the fast measurement of small displacement

Ruiming Li; Tadashi Aruga

doi:10.1117/12.322034

21 September 1998 Interferometer system scheme for the fast measurement of small displacement

Ruiming Li, Tadashi Aruga

Proceedings Volume 3482, International Optical Design Conference 1998; (1998) https://doi.org/10.1117/12.322034
Event: International Optical Design Conference, 1998, Kona, HI, United States

Abstract

An interferometer system scheme is proposed. This system consists of two Michelson interferometers and two laser sources and requires no use of modulation technique. Within a displacement range of about 10 microns, it is expected that the absolute displacement can be measured with a very high speed without the phase ambiguity problem. The possibility is demonstrated by numerical analysis.

Citation Download Citation

Ruiming Li and Tadashi Aruga "Interferometer system scheme for the fast measurement of small displacement", Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); https://doi.org/10.1117/12.322034

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