Paper
22 May 1998 Comparison of techniques for bonding VCSELs directly to ICs
Author Affiliations +
Proceedings Volume 3490, Optics in Computing '98; (1998) https://doi.org/10.1117/12.308861
Event: Optics in Computing '98, 1998, Bruges, Belgium
Abstract
The fabrication technologies and bonding characteristics of three VCSEL bonding techniques are compared in order to determine the more reliable and robust.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rui Pu, Eric M. Hayes, Carl W. Wilmsen, Kent D. Choquette, Hong Q. Hou, and Kent M. Geib "Comparison of techniques for bonding VCSELs directly to ICs", Proc. SPIE 3490, Optics in Computing '98, (22 May 1998); https://doi.org/10.1117/12.308861
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Cited by 1 scholarly publication.
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KEYWORDS
Vertical cavity surface emitting lasers

Gold

Etching

Epoxies

Resistance

Optical lithography

Plasma etching

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