Paper
22 May 1998 Increasing the performance of polarization-selective diffractive optical elements
Nancy Nieuborg, Irina P. Veretennicoff, Scott McCoy, David R. Brown, Hugo Thienpont
Author Affiliations +
Proceedings Volume 3490, Optics in Computing '98; (1998) https://doi.org/10.1117/12.308976
Event: Optics in Computing '98, 1998, Bruges, Belgium
Abstract
We present the fabrication of dry etched calcite polarization-selective diffractive optical elements. We demonstrate the feasibility of both submicron and multilevel elements with increased performance.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nancy Nieuborg, Irina P. Veretennicoff, Scott McCoy, David R. Brown, and Hugo Thienpont "Increasing the performance of polarization-selective diffractive optical elements", Proc. SPIE 3490, Optics in Computing '98, (22 May 1998); https://doi.org/10.1117/12.308976
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KEYWORDS
Calcite

Diffractive optical elements

Ions

Etching

Diffraction

Photoresist materials

Polarization

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