Physical surface effects of Ti:LiNbO3 diffusion

Wiley K. Smith

doi:10.1117/12.328758

4 December 1998 Physical surface effects of Ti:LiNbO₃ diffusion

Wiley K. Smith

Proceedings Volume 3491, 1998 International Conference on Applications of Photonic Technology III: Closing the Gap between Theory, Development, and Applications; (1998) https://doi.org/10.1117/12.328758
Event: 1998 International Conference on Applications of Photonic Technology, 1998, Ottawa, Canada

Abstract

Titanium (Ti) diffusion into lithium niobate (LiNbO₃) is often used to define waveguides for integrated optics devices which are now of considerable commercial importance. I report here on changes in the surface shape caused by titanium diffusion for fabricating (LiNbO₃) integrated optical devices. I found that the processing leaves surface ridges whose height and shape depend on mass flow of lithium niobate, thickness of titanium, hydrogen content of diffusion atmosphere, and time at temperature. I also describe the surface effects of a reaction between LiNbO₃ and quartz (silicon). To my knowledge the effects reported here have never before been reported in the open literature.

Citation Download Citation

Wiley K. Smith "Physical surface effects of Ti:LiNbO₃ diffusion", Proc. SPIE 3491, 1998 International Conference on Applications of Photonic Technology III: Closing the Gap between Theory, Development, and Applications, (4 December 1998); https://doi.org/10.1117/12.328758

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