Laser-induced damage of optical coatings grown with surface chemical reaction

Shin-ichi Zaitsu; Shinji Motokoshi; Takahisa Jitsuno; Tatsuhiko Yamanaka

doi:10.1117/12.354234

23 July 1999 Laser-induced damage of optical coatings grown with surface chemical reaction

Shin-ichi Zaitsu, Shinji Motokoshi, Takahisa Jitsuno, Tatsuhiko Yamanaka

Proceedings Volume 3492, Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion; (1999) https://doi.org/10.1117/12.354234
Event: Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion, 1998, Monterey, CA, United States

Abstract

We prepared optical thin films grown with surface chemical reactions using TiCl₄ and H₂O for TiO₂, Al(CH₃)3 and H₂O₂ for Al₂O₃ as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be preciously controlled only by the number of cycles. Two-layer TiO₂/Al₂O₃ anti-reflection coating with less than 0.2 percent reflection loss at 532nm was fabricated. Laser induced threshold strongly depend on the growth temperature and the introduced gas pressure. They increasing with decreasing the growth temperature and with increasing the introduced gas pressure.

Citation Download Citation

Shin-ichi Zaitsu, Shinji Motokoshi, Takahisa Jitsuno, and Tatsuhiko Yamanaka "Laser-induced damage of optical coatings grown with surface chemical reaction", Proc. SPIE 3492, Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion, (23 July 1999); https://doi.org/10.1117/12.354234

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