MEMS assembly apparatus with a suction glass needle

Dunwu Lu; Huijie Huang; Beijun Shen; Liangmin Yang; Zengshui Liu; Longlong Du

doi:10.1117/12.324317

31 August 1998 MEMS assembly apparatus with a suction glass needle

Dunwu Lu, Huijie Huang, Beijun Shen, Liangmin Yang, Zengshui Liu, Longlong Du

Proceedings Volume 3511, Micromachining and Microfabrication Process Technology IV; (1998) https://doi.org/10.1117/12.324317
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

To meet the MEMS assembly requirement, we have developed an assembly apparatus. This apparatus consists of a stereo microscope, a CCD camera incorporated with a video monitor, an X-Y translation precision stage, and a specifically fabricated suction glass needle. The suction glass needle is the core component in this apparatus, which is mounted on a micromanipulator, and used to suck up the microelements to be assembled. The assembly operation is carried out under the observation of a stereo microscope with a video camera. As a result, an electro-static micromotor with a 300 micrometer diameter rotor is accurately assembled by this assembly apparatus.

Citation Download Citation

Dunwu Lu, Huijie Huang, Beijun Shen, Liangmin Yang, Zengshui Liu, and Longlong Du "MEMS assembly apparatus with a suction glass needle", Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); https://doi.org/10.1117/12.324317

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