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2 September 1998 Applications of shape-memory alloys in MOEMS and in optics
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Proceedings Volume 3513, Microelectronic Structures and MEMS for Optical Processing IV; (1998)
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
The application of shape memory alloy (SMA) thin films in optical devices is introduced and explored for the first time. Physical and optical properties of Titanium-Nickel (TiNi) SMA thin films change as these films undergo phase transformation upon heating. An optical beam can be modulated either mechanically using a TiNi actuator or by the changes that occur in TiNi's optical properties upon heating and phase transformation. Reflection coefficient of TiNi films were measured in their so called martensitic (at room temperature) and austenitic (elevated temperature) phases. The reflection coefficient of the austenitic phase were higher than those of the martensitic phase by more than 45% in the wavelength range between 550 - 850 nm. Also, a microfabricated TiNi diaphragm with a 0.26 mm diameter hole was used as a prototype light-valve. The intensity of the transmitted light through the hole was reduced by 10 - 17% when the diaphragm was heated. A novel TiNi light-valve fabricated using silicon micromachining techniques is also proposed and discussed. We present both optical data and structural data obtained using transmission electron microscopies.
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Boonsong Sutapun, Massood Tabib-Azar, and Michael A. Huff "Applications of shape-memory alloys in MOEMS and in optics", Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998);

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