Extremely high aspect ratio metal structures for suspension of a micro-optical shutter

Allan P. Hui; Risaku Toda; Masayoshi Esashi

doi:10.1117/12.324269

2 September 1998 Extremely high aspect ratio metal structures for suspension of a micro-optical shutter

Allan P. Hui, Risaku Toda, Masayoshi Esashi

Proceedings Volume 3513, Microelectronic Structures and MEMS for Optical Processing IV; (1998) https://doi.org/10.1117/12.324269
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

A bulk micromachining process for fabricating extremely high aspect ratio metal structures is developed. The structures are thin films perpendicular to the plane of the substrate. The metal structures offer various physical and chemical properties depending on the choice of the metal used. Internal stress considerations for the choice of metal are also discussed.

Citation Download Citation

Allan P. Hui, Risaku Toda, and Masayoshi Esashi "Extremely high aspect ratio metal structures for suspension of a micro-optical shutter", Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); https://doi.org/10.1117/12.324269

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