MOEM pressure and other physical sensors using photon tunneling and optical evanescent fields with exponential sensitivities and excellent stabilities

Massood Tabib-Azar; Boonsong Sutapun

doi:10.1117/12.324280

2 September 1998 MOEM pressure and other physical sensors using photon tunneling and optical evanescent fields with exponential sensitivities and excellent stabilities

Massood Tabib-Azar, Boonsong Sutapun

Author Affiliations +

Proceedings Volume 3513, Microelectronic Structures and MEMS for Optical Processing IV; (1998) https://doi.org/10.1117/12.324280
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

Evanescent optical fields and photon tunneling junctions can be used to monitor position of an object with an exponential sensitivity given by exp(-x/x₀) where x₀ is the fraction of the photon wavelength. Compared with electron tunneling methods, photon based physical sensors do not suffer from coulombic attractive forces (and backlashes) and tunneling junction deterioration that result in modification of the sensor sensitivity and excess noise, respectively. Experimental results obtained using fiber optic photon tunneling junctions and micromachined Si diaphragms clearly indicate the exponential sensitivity of these sensors. We will present these experimental data and discuss design rules and methodologies for photon tunneling physical sensors and accelerometers.

Citation Download Citation

Massood Tabib-Azar and Boonsong Sutapun "MOEM pressure and other physical sensors using photon tunneling and optical evanescent fields with exponential sensitivities and excellent stabilities", Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); https://doi.org/10.1117/12.324280

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