Characterization techniques for surface-micromachined devices

William P. Eaton; Norman F. Smith; Lloyd W. Irwin; Danelle M. Tanner

doi:10.1117/12.323919

8 September 1998 Characterization techniques for surface-micromachined devices

William P. Eaton, Norman F. Smith, Lloyd W. Irwin, Danelle M. Tanner

Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323919
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

Using a microengine as the primary test vehicle, we have examined several aspects of characterization. Parametric measurements provide fabrication process information. Drive signal optimization is necessary for increased microengine performance. Finally, electrical characterization of resonant frequency and quality factor can be more accurate than visual techniques.

Citation Download Citation

William P. Eaton, Norman F. Smith, Lloyd W. Irwin, and Danelle M. Tanner "Characterization techniques for surface-micromachined devices", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323919

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