Microresonant devices for power conversion

J. Mark Noworolski; Seth R. Sanders

doi:10.1117/12.323897

8 September 1998 Microresonant devices for power conversion

J. Mark Noworolski, Seth R. Sanders

Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323897
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

We present the concept of utilizing micro-electromechanical (MEM) energy storage for power conversion. A capacitor and inductor-free step-up converter based on mechanical resonance and silicon strain energy is introduced. In this circuit, a single MEM device is used to generate and supply high voltages, suitable for driving other MEM devices. A test converter using vertical polysilicon based resonators as energy storage elements is fabricated and tested, demonstrating the basic step-up function.

Citation Download Citation

J. Mark Noworolski and Seth R. Sanders "Microresonant devices for power conversion", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323897

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