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8 September 1998 Wideband microwave switch by micromachining techniques
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Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323894
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
A micromachined microwave switch has been made on a semi- insulating GaAs substrate using a suspended membrane, gold coplanar waveguide (CPW), and electrostatic actuation as the switching mechanism. The electrostatic traction comes from the dc voltage applied between the ground of the CPW and the suspended membrane.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chienliu Chang, Peizen Chang, Kaihsiang Yen, and Sheyshi Lu "Wideband microwave switch by micromachining techniques", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323894
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