Optical MEMS-based fluorescence detection scheme with applications to capillary electrophoresis

Kurt D. Kramer; Kwang Wook Oh; Chong Hyuk Ahn; James J. Bao; Kenneth R. Wehmeyer

doi:10.1117/12.322098

10 September 1998 Optical MEMS-based fluorescence detection scheme with applications to capillary electrophoresis

Kurt D. Kramer, Kwang Wook Oh, Chong Hyuk Ahn, James J. Bao, Kenneth R. Wehmeyer

Proceedings Volume 3515, Microfluidic Devices and Systems; (1998) https://doi.org/10.1117/12.322098
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

A new laser-induced fluorescence detection system for capillary electrophoresis has been designed, built, and tested in this work. Multi-mode optical fibers were incorporated on-chip to couple laser light into the detection area on a borosilicate glass substrate. A metal- semiconductor-metal GaAs photodiode was fabricated and mounted over the separation capillary using a new conductive polymer flip-chip bonding approach, replacing the traditional photomultiplier tube in the detection scheme. Proper operation of the photodiode after interconnection was verified by directly impinging light into the detector using two laser sources. For both dry and filled channels, several laser source-fluorescent dye combinations were employed in order to generate a fluorescence signal (approximately few nA) detected by the photodiode. We thus demonstrate the feasibility of integrating optical MEMS into chemical micro total analysis systems ((mu) -TAS). In the future, this has the potential to improve functionality, throughput, and ease of operation of these `laboratories on chip'.

Citation Download Citation

Kurt D. Kramer, Kwang Wook Oh, Chong Hyuk Ahn, James J. Bao, and Kenneth R. Wehmeyer "Optical MEMS-based fluorescence detection scheme with applications to capillary electrophoresis", Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); https://doi.org/10.1117/12.322098

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available