Paper
7 July 1983 Ion-Etching As A Means Of Blazing And Optimizing Holographic Diffraction Gratings
J. M. Lerner, J. Flamand, A. Thevenon
Author Affiliations +
Abstract
Holographic diffraction gratings, when used in a spectroscopic application, produce excellent image quality and stray-light rejection, but sometimes lack optimum efficiency. Ionetching through a sinusoidal photoresist groove into a glass substrate can produce triangular profiles comparable with the groove shape produced by classical diamond burnishing. This can be accomplished in both plano, spherical and aspheric substrates to produce gratings comparable in efficiency to classically ruled gratings.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. M. Lerner, J. Flamand, and A. Thevenon "Ion-Etching As A Means Of Blazing And Optimizing Holographic Diffraction Gratings", Proc. SPIE 0353, Industrial and Commercial Applications of Holography, (7 July 1983); https://doi.org/10.1117/12.933952
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Cited by 2 scholarly publications.
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KEYWORDS
Holography

Diffraction gratings

Etching

Ions

Vacuum ultraviolet

Spherical lenses

Epoxies

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