Microflow devices for miniaturized chemical analysis systems

Stephanus Buettgenbach; Christian Robohm

doi:10.1117/12.333754

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18 December 1998 Microflow devices for miniaturized chemical analysis systems

Stephanus Buettgenbach, Christian Robohm

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Proceedings Volume 3539, Chemical Microsensors and Applications; (1998) https://doi.org/10.1117/12.333754
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

In the development of chemical analysis systems a clear trend exists towards miniaturization using silicon micromachining. This paper reports on microflow devices such as microvalves, micropumps and bioreactors developed for the application to analytical chemistry. As examples, the design and performance of integrated enzyme-based analysis systems for the determination of gas-phase ethanol will be described.

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Stephanus Buettgenbach and Christian Robohm "Microflow devices for miniaturized chemical analysis systems", Proc. SPIE 3539, Chemical Microsensors and Applications, (18 December 1998); https://doi.org/10.1117/12.333754

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