Author Affiliations +
John S. Petersen,1 Martin McCallum,1 Nishrin Kachwala,2 Robert John Socha,3 J. Fung Chen,4 Thomas L. Laidig,4 Bruce W. Smith,5 Ronald L. Gordon,6 Chris A. Mack6
1International SEMATECH (United States)
2SEMATECH (United States)
3National Semiconductor Corp. (United States)
4MicroUnity Systems Engineering, Inc. (United States)
5Rochester Institute of Technology (United States)
6FINLE Technologies, Inc. (United States)