Stage Cartesian self-calibration: a second method

Michael T. Takac; John M. Whittey

doi:10.1117/12.332853

18 December 1998 Stage Cartesian self-calibration: a second method

Michael T. Takac, John M. Whittey

Proceedings Volume 3546, 18th Annual BACUS Symposium on Photomask Technology and Management; (1998) https://doi.org/10.1117/12.332853
Event: 18th Annual BACUS Symposium on Photomask Technology and Management, 1998, Redwood City, CA, United States

Abstract

A physical two-dimensional Cartesian reference has been demonstrated using group theory principles pioneered by Michael Raugh. The first stage Cartesian self-calibration introduction to the microlithographic industry was developed by Stanford University, Hewlett Packard, and IBM San Jose using Leica's LMS-2000 and LMS-2020 platforms. Recently Leica developed a different method based on a similar theory to achieve a Cartesian calibration for their LMS-IPRO x-y metrology system. A review of these methods and a comparison of the results obtained between the methods are presented.

Citation Download Citation

Michael T. Takac and John M. Whittey "Stage Cartesian self-calibration: a second method", Proc. SPIE 3546, 18th Annual BACUS Symposium on Photomask Technology and Management, (18 December 1998); https://doi.org/10.1117/12.332853

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