Experimental research on the scanning performance of a four-segmented PZT tube

Xiumei Liu; Jia Wang; Dacheng Li

doi:10.1117/12.318156

13 August 1998 Experimental research on the scanning performance of a four-segmented PZT tube

Xiumei Liu, Jia Wang, Dacheng Li

Proceedings Volume 3555, Optical and Fiber Optic Sensor Systems; (1998) https://doi.org/10.1117/12.318156
Event: Photonics China '98, 1998, Beijing, China

Abstract

A four-segmented piezoelectric tube performs XYZ spatial scanning in a SPM system. The measurement of characteristics including scanning range, accuracy, linearity and the lowest resonant frequency are essential to obtain a reliable image and get information about the scanning velocity. An optical fiber laser interferometer capable of vibration measurement is used to characterize the scanning tube with the inner diameter of 6mm, thickness 1mm and length 25mm is measured. We find that the lowest resonant frequency is much lower than the calculated result. The low resonant frequency will limit the scanning velocity and influence the quality of the obtained image greatly. In addition, the non-linearity curve can be obtained by driving the scanning tube with a triangle wave slowly. The measurement is easy, quick and continuous. In addition, we measure the non-linearity statically by inductive micrometer as well. The two results are compared. The result shows that there is difference between them.

Citation Download Citation

Xiumei Liu, Jia Wang, and Dacheng Li "Experimental research on the scanning performance of a four-segmented PZT tube", Proc. SPIE 3555, Optical and Fiber Optic Sensor Systems, (13 August 1998); https://doi.org/10.1117/12.318156

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