Fabrication of polymer channel waveguides by photobleaching

Qishun Shen; Xiangming Liu; Linlin Qiu; Zhuangqi Cao; Yingli Chen

doi:10.1117/12.318289

5 August 1998 Fabrication of polymer channel waveguides by photobleaching

Qishun Shen, Xiangming Liu, Linlin Qiu, Zhuangqi Cao, Yingli Chen

Proceedings Volume 3557, Current Developments in Optical Elements and Manufacturing; (1998) https://doi.org/10.1117/12.318289
Event: Photonics China '98, 1998, Beijing, China

Abstract

Photobleaching technique is a standard photoresist procedure. A photobleaching process causes a reduction of refractive index in the exposed regions, forming a high index strip waveguide. This method is quite promising.

Citation Download Citation

Qishun Shen, Xiangming Liu, Linlin Qiu, Zhuangqi Cao, and Yingli Chen "Fabrication of polymer channel waveguides by photobleaching", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); https://doi.org/10.1117/12.318289

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