Influence of deposition parameters on adhesion of diamondlike carbon film prepared by pulse-arc plasma deposition

Zhinong Yu; Yixing Yan

doi:10.1117/12.318281

5 August 1998 Influence of deposition parameters on adhesion of diamondlike carbon film prepared by pulse-arc plasma deposition

Zhinong Yu, Yixing Yan

Author Affiliations +

Proceedings Volume 3557, Current Developments in Optical Elements and Manufacturing; (1998) https://doi.org/10.1117/12.318281
Event: Photonics China '98, 1998, Beijing, China

Abstract

Diamond-like carbon films are prepared on silicon by pulse- arc plasma deposition. By means of orthogonal test method and scratch test technique, the relationships between adhesion of the deposited films and deposition parameters have been systematically analyzed. The results show that the substrate temperature, the voltage U across the interelectrode and the frequency of pulse greatly effect adhesion of the deposited films. The adhesion is strengthened with increasing substrate temperature and decreasing voltage across the interelectrode. A threshold frequency exists in dependence of adhesion of the deposited films on the frequency. The scratch test also indicates that intensive internal stress plays an important role in the adhesion of diamond-like carbon film.

Citation Download Citation

Zhinong Yu and Yixing Yan "Influence of deposition parameters on adhesion of diamondlike carbon film prepared by pulse-arc plasma deposition", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); https://doi.org/10.1117/12.318281

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available