Creation of superhard C3N4 films by laser ablation

Miroslav Jelinek; Jan Lancok; Wilhelm Kulisch; Rumen I. Tomov

doi:10.1117/12.347663

7 May 1999 Creation of superhard C₃N₄ films by laser ablation

Miroslav Jelinek, Jan Lancok, Wilhelm Kulisch, Rumen I. Tomov

Proceedings Volume 3571, Tenth International School on Quantum Electronics: Laser Physics and Applications; (1999) https://doi.org/10.1117/12.347663
Event: 10th International School on Quantum Electronics: Lasers: Physics and Applications, 1998, Varna, Bulgaria

Abstract

Contribution deal with laser deposition of superhard carbon nitride (beta) -C₃N₄ thin films. Survey of results reached by various groups is done. Problems of stoichiometry definition, stoichiometry measurement and deposition parameters having influence on the increase of nitrogen content in layers is discussed.

Citation Download Citation

Miroslav Jelinek, Jan Lancok, Wilhelm Kulisch, and Rumen I. Tomov "Creation of superhard C₃N₄ films by laser ablation", Proc. SPIE 3571, Tenth International School on Quantum Electronics: Laser Physics and Applications, (7 May 1999); https://doi.org/10.1117/12.347663

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