High-optical-quality LiNbO3 thin films obtained by pulsed laser deposition

D. Ghica; Mariuca Gartner; F. Ciobanu; V. Nelea; C. Martin; Ion N. Mihailescu

doi:10.1117/12.320993

19 August 1998 High-optical-quality LiNbO₃ thin films obtained by pulsed laser deposition

D. Ghica, Mariuca Gartner, F. Ciobanu, V. Nelea, C. Martin, Ion N. Mihailescu

Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.320993
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary

Abstract

We report the successful growth of high optical quality LiNbO₃ thin films (high birefringence and good transparency over the entire visible spectral range) by pulse laser deposition (PLD) on Si substrates. PLD of a LiNbO₃ single-crystal target was carried out using a KrF* excimer laser ((lambda) equals 248 nm, E equals 80 mJ, (tau) equals 20 ns, v equals 2 Hz). The thin films have been deposited in oxygen and, for some of them, a thermal treatment has been applied in an oxygen atmosphere. The thin films have been characterized by grazing incidence X-ray diffraction, spectroscopic ellipsometry and Fourier transform infrared spectroscopy.

Citation Download Citation

D. Ghica, Mariuca Gartner, F. Ciobanu, V. Nelea, C. Martin, and Ion N. Mihailescu "High-optical-quality LiNbO₃ thin films obtained by pulsed laser deposition", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.320993

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