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22 December 1998 High-average-power excimer lasers
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Proceedings Volume 3574, XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (1998) https://doi.org/10.1117/12.334492
Event: Twelfth International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, 1998, St. Petersburg, Russian Federation
Abstract
A review of recent achievements and new tendencies in the development high energy, high repetition rate excimer lasers will be presented. The paper mainly focuses on the features of KrF, XeCl lasers with different combinations of output energy x pulse repetition frequency, for example: 1 J X 600 Hz (KrF); 3 J X 200 Hz or 10 J X 100 Hz (XeCl), which have been developed as candidates for industrial applications.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir M. Borisov, Andrei I. Demin, Oleg B. Khristoforov, Yurii B. Kirykhin, Aleksandr Yu. Vinokhodov, V. A. Vodchits, Dirk Basting, Uwe Stamm, Frank Voss, and Igor Bragin "High-average-power excimer lasers", Proc. SPIE 3574, XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (22 December 1998); https://doi.org/10.1117/12.334492
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