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22 December 1998 Timing of the x-ray preionization of a discharge-pumped ArF excimer laser with different excitation circuits
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Proceedings Volume 3574, XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (1998) https://doi.org/10.1117/12.334503
Event: Twelfth International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, 1998, St. Petersburg, Russian Federation
Abstract
An ArF excimer laser has been operated using four different spiker-sustainer excitation circuits. We report on the large differences in the laser output energy caused by nanosecond- scale variations in the preionization timing with each circuit.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. Feenstra, O. B. Hoekstra, Peter J. M. Peters, and Wilhelmus J. Witteman "Timing of the x-ray preionization of a discharge-pumped ArF excimer laser with different excitation circuits", Proc. SPIE 3574, XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (22 December 1998); https://doi.org/10.1117/12.334503
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