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7 January 1999 Low-cost low-power uncooled a-Si-based micro infrared camera
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Proceedings Volume 3577, Sensors, C3I, Information, and Training Technologies for Law Enforcement; (1999)
Event: Enabling Technologies for Law Enforcement and Security, 1998, Boston, MA, United States
An amorphous silicon (a-Si) microbolometer-based uncooled infrared camera technology, offering a low- cost, low-power solution to infrared surveillance for both civilian and military application is presented. A- Si exhibits a temperature dependent resistance with a 3000K temperature coefficient of resistance (TCR) of 2.7 percent/K. The uncooled a-Si microbolometer detector structure employs a low thermal mass a-Si membrane structure with high thermal isolation legs monolithically integrated on a CMOS readout integrated circuit (ROIC) chip. A refractive resonant cavity design results in approximately 90 percent infrared absorptance over the 8-13 um spectral band. A-Si also exhibits a UV/visible photoconductive response for multispectral applications. The ROIC involves an integrating amplifier per pixel and a column multiplexed output. A 15 x 31 micro infrared camera (MIRC) has been developed, which exhibits f/l noise equivalent temperature difference, thereby significantly reducing the power requirements. The 15 x 31 camera demonstrated exhibits a 35 mm camera form factor employing a low cost f/l singlet optic and LED display, as well as low cost vacuum packaging. A larger 120 x 160 version of the MIRC is also in development and will be discussed.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas R. Schimert, David D. Ratcliff, Roland W. Gooch, Bobbi Ritchey, P. McCardel, John F. Brady III, K. Rachels, Steven J. Ropson, Marty Wand, M. Weinstein, and John Wynn "Low-cost low-power uncooled a-Si-based micro infrared camera", Proc. SPIE 3577, Sensors, C3I, Information, and Training Technologies for Law Enforcement, (7 January 1999);

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