Determination of the elastic properties of carbon thin films using scanning acoustic microscopy

A. Pageler; Klaus Kosbi; Ulf G. Brauneck; Hans Gerd G. Busmann; Siegfried Boseck

doi:10.1117/12.330498

11 November 1998 Determination of the elastic properties of carbon thin films using scanning acoustic microscopy

A. Pageler, Klaus Kosbi, Ulf G. Brauneck, Hans Gerd G. Busmann, Siegfried Boseck

Proceedings Volume 3581, Acousto-Optics and Applications III; (1998) https://doi.org/10.1117/12.330498
Event: Acousto-Optics and Applications III, 1998, Gdansk-Jurata, Poland

Abstract

Scanning acoustic microscopy is used to determine elastic properties of carbon thin films. The films have been deposited by fullerene-argon-ionbeam deposition on crownglass substrates. With V(z) measurements, their elastic constants and experimental dispersion relations can be obtained. These are compared with numerically calculated dispersion relations. Using a simplex method for least- square data fitting the Young's modulus, the shear modulus and Poisson's ratio of the measured carbon thin films were determined.

Citation Download Citation

A. Pageler, Klaus Kosbi, Ulf G. Brauneck, Hans Gerd G. Busmann, and Siegfried Boseck "Determination of the elastic properties of carbon thin films using scanning acoustic microscopy", Proc. SPIE 3581, Acousto-Optics and Applications III, (11 November 1998); https://doi.org/10.1117/12.330498

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