Surface modification of TiN and (Ti,Al)N coatings by the TEA CO2 laser

Milan S. Trtica; Biljana M. Gakovic; Tomislav M. Nenadovic

doi:10.1117/12.350652

7 June 1999 Surface modification of TiN and (Ti,Al)N coatings by the TEA CO₂ laser

Milan S. Trtica, Biljana M. Gakovic, Tomislav M. Nenadovic

Proceedings Volume 3612, Gas and Chemical Lasers and Intense Beam Applications II; (1999) https://doi.org/10.1117/12.350652
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

The interaction of a Transversely Excited Atmospheric (TEA) CO2 laser, pulse duration less than 2 µs, with low thickness coatings of titanium-nitride (TiN) and titanium-aluminum-nitride (TiAl)N, deposited on steel-substrate is considered. The investigations have shown that both coatings had been intensively modified by TEA CO2 laser beam. The (Ti,Al)N compared to TiN shows more expressed changes in the bombarded area: cracking and other surface modifications. Intensive surface exfoliation was observed only for (Ti,Al)N. Especially attention was devoted to the effects of laser pulse shape on morphology features. Generally, laser pulses with tail induced more signified changes on the coating surface.

Citation Download Citation

Milan S. Trtica, Biljana M. Gakovic, and Tomislav M. Nenadovic "Surface modification of TiN and (Ti,Al)N coatings by the TEA CO₂ laser", Proc. SPIE 3612, Gas and Chemical Lasers and Intense Beam Applications II, (7 June 1999); https://doi.org/10.1117/12.350652

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