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29 April 1999 Novel method for fabricating 3D helical THz antennas directly on semiconductor substrates
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Abstract
The fabrication of 3D helical antennas, designed for the low THz frequency range, will allow for the efficient transmission and reception of circularly polarized radiation. This paper presents a novel method of fabricating helical antennas, singular and arrayed, for the low THz frequency range. The THz antenna structures are fabricated by using Laser Chemical Vapor Deposition (LCVD) to form fibers that can be grown into complex 3D structures directly on semiconductor substrates. By focusing the laser through a diffractive optic, arrays of antennas can be fabricated at the same time. THz radiation detection devices can be realized by combining the LCVD antennas with MEMS micro- bolometers that convert received THz radiation into a change in resistance. Arrays of these antenna-bolometer pairs can be fabricated on the same substrate to realize a THz imaging device.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert N. Dean Jr., Paul C. Nordine, and Christos G. Christodoulou "Novel method for fabricating 3D helical THz antennas directly on semiconductor substrates", Proc. SPIE 3617, Terahertz Spectroscopy and Applications, (29 April 1999); https://doi.org/10.1117/12.347110
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