Transparent conductive sol-gel thin films for photonic applications

Terho K. Kololuoma; Juha T. Rantala; Jouko Vaehaekangas; Risto S. Laitinen

doi:10.1117/12.343723

26 March 1999 Transparent conductive sol-gel thin films for photonic applications

Terho K. Kololuoma, Juha T. Rantala, Jouko Vaehaekangas, Risto S. Laitinen

Proceedings Volume 3620, Integrated Optics Devices III; (1999) https://doi.org/10.1117/12.343723
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

Antimony doped tin dioxide (SnO₂:Sb) thin films are fabricated by a new simplified sol-gel process. Films are prepared from an alcoholic solution of SnCl₄(DOT)4H₂O doped with SbCl₃. Films are deposited by the spin coating process on sodalime glass, borosilicate glass, silicon wafers and ceramic alumina substrates. The chemical reactions during the heat treatment are monitored by DSC and TG. The chemical composition of the coatings are determined by scanning electron microscopy (SEM). Sheet resistance, R_s, is measured using a linear four-probe technique. Optical properties of the films are also determined. The resistivity of the thin films are presented as a function of the antimony doping level. The smallest sheet resistance of 200 (Omega) /$DAL is found for a 250 nm thick coating on a borosilicate substrate. It is observed that the sheet resistance does not decrease linearly with increasing film thickness. Fabrication possibilities of these materials for the integrated optics based sensors including patterning methods are discussed.

Citation Download Citation

Terho K. Kololuoma, Juha T. Rantala, Jouko Vaehaekangas, and Risto S. Laitinen "Transparent conductive sol-gel thin films for photonic applications", Proc. SPIE 3620, Integrated Optics Devices III, (26 March 1999); https://doi.org/10.1117/12.343723

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