Reactor and process modeling in optoelectronic device fabrication

Meyya Meyyappan; Deepak Bose

doi:10.1117/12.356905

6 August 1999 Reactor and process modeling in optoelectronic device fabrication

Meyya Meyyappan, Deepak Bose

Proceedings Volume 3625, Physics and Simulation of Optoelectronic Devices VII; (1999) https://doi.org/10.1117/12.356905
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

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Meyya Meyyappan and Deepak Bose "Reactor and process modeling in optoelectronic device fabrication", Proc. SPIE 3625, Physics and Simulation of Optoelectronic Devices VII, (6 August 1999); https://doi.org/10.1117/12.356905

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