High-speed high-efficiency resonant-cavity-enhanced photodiodes

Ekmel Ozbay; Ibrahim Kimukin; Necmi Biyikli; Orhan Aytur; Mutlu Goekkavas; Goekhan Ulu; M. Selim Unlu; Richard P. Mirin; Kristine A. Bertness; David H. Christensen; Elias Towe; Gary Tuttle

doi:10.1117/12.344566

7 April 1999 High-speed high-efficiency resonant-cavity-enhanced photodiodes

Ekmel Ozbay, Ibrahim Kimukin, Necmi Biyikli, Orhan Aytur, Mutlu Goekkavas, Goekhan Ulu, M. Selim Unlu, Richard P. Mirin, Kristine A. Bertness, David H. Christensen, Elias Towe, Gary Tuttle

Author Affiliations +

Proceedings Volume 3629, Photodetectors: Materials and Devices IV; (1999) https://doi.org/10.1117/12.344566
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

In this paper, we review our research efforts on RCE high- speed high-efficiency p-i-n and Schottky photodiodes. Using a microwave compatible planar fabrication process, we have designed and fabricated GaAs based RCE photodiodes. For RCE Schottky photodiodes, we have achieved a peak quantum efficiency of 50% along with a 3-dB bandwidth of 100 GHz. The tunability of the detectors via a recess etch is also demonstrated. For p-i-n type photodiodes, we have fabricated and tested widely tunable devices with near 100% quantum efficiencies, along with a 3-dB bandwidth of 50 GHz. Both of these results correspond to the fastest RCE photodetectors published in scientific literature.

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Ekmel Ozbay, Ibrahim Kimukin, Necmi Biyikli, Orhan Aytur, Mutlu Goekkavas, Goekhan Ulu, M. Selim Unlu, Richard P. Mirin, Kristine A. Bertness, David H. Christensen, Elias Towe, and Gary Tuttle "High-speed high-efficiency resonant-cavity-enhanced photodiodes", Proc. SPIE 3629, Photodetectors: Materials and Devices IV, (7 April 1999); https://doi.org/10.1117/12.344566

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