Determination of residual stress and elastic constants of silicon open stencil masks for ion projection lithography

Artur Degen; Feng Shi; Eva Sossna; R. Sunyk; Joachim Voigt; Burkhard E. Volland; B. Reinker; Ivo W. Rangelow

doi:10.1117/12.346213

23 April 1999 Determination of residual stress and elastic constants of silicon open stencil masks for ion projection lithography

Artur Degen, Feng Shi, Eva Sossna, R. Sunyk, Joachim Voigt, Burkhard E. Volland, B. Reinker, Ivo W. Rangelow

Author Affiliations +

Proceedings Volume 3665, 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98; (1999) https://doi.org/10.1117/12.346213
Event: 15th European Conference on Mask Technology for Integrated Circuits and Micro-Components, 1998, Munich, Germany

Abstract

The Ion Projection Lithography is one challenge for a semiconductor technology, starting with sub micron structures, which are beyond the facilities of conventional UV lithography. Within this field of research one of the most critical aspects is the development of stencil mask, because the stress formation during the various process steps affects the critical dimensions of the structures to be written. In this paper different methods for the determination of residual stress and elastic constants of thin membranes of doped silicon are reviewed and additionally, a novel technique is presented. First experimental result show, that they are quite different from the values of the bulk material.

Citation Download Citation

Artur Degen, Feng Shi, Eva Sossna, R. Sunyk, Joachim Voigt, Burkhard E. Volland, B. Reinker, and Ivo W. Rangelow "Determination of residual stress and elastic constants of silicon open stencil masks for ion projection lithography", Proc. SPIE 3665, 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98, (23 April 1999); https://doi.org/10.1117/12.346213

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available