Finite element simulation and optimization of piezoelectric suspensions

Zhimin He; Wei Guo; Qinghua Li; Enghong Ong; Tony Huang

doi:10.1117/12.350688

9 June 1999 Finite element simulation and optimization of piezoelectric suspensions

Zhimin He, Wei Guo, Qinghua Li, Enghong Ong, Tony Huang

Proceedings Volume 3668, Smart Structures and Materials 1999: Smart Structures and Integrated Systems; (1999) https://doi.org/10.1117/12.350688
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

The resonance modes and the displacement sensitivity of a dual-stage, piezoelectric micro-actuator/suspension for high track density magnetic recording systems were investigated by finite element method. Theoretical dynamic and electrostatic analyses were performed to investigate the resonance frequency of in-plane bending mode and the displacement sensitivity of the piezoelectric actuator with different shapes. Based upon the analyses of piezoelectric actuators, the optimization of piezoelectric suspension was conducted to achieve a high resonance frequency of sway mode and large displacement sensitivity. The finite element simulation results on a planar piezoelectric suspension agree quite well with the experimental measurements using a Laser Doppler Vibrometer. The optimized piezoelectric suspension demonstrates better performances than those of the planar piezoelectric suspension.

Citation Download Citation

Zhimin He, Wei Guo, Qinghua Li, Enghong Ong, and Tony Huang "Finite element simulation and optimization of piezoelectric suspensions", Proc. SPIE 3668, Smart Structures and Materials 1999: Smart Structures and Integrated Systems, (9 June 1999); https://doi.org/10.1117/12.350688

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