Rotary ultrasonic motors actuated by traveling flexural waves

Yoseph Bar-Cohen; Xiaoqi Bao; Willem Grandia

doi:10.1117/12.350745

9 June 1999 Rotary ultrasonic motors actuated by traveling flexural waves

Yoseph Bar-Cohen, Xiaoqi Bao, Willem Grandia

Proceedings Volume 3668, Smart Structures and Materials 1999: Smart Structures and Integrated Systems; (1999) https://doi.org/10.1117/12.350745
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

Efficient miniature actuators that are compact and consume low power are needed to drive space and planetary mechanisms in future NASA missions. Ultrasonic rotary motors have the potential to meet this NASA need and they are developed as actuators for miniature telerobotic applications. These motors have emerged in commercial products but they need to be adapted for operation at the harsh space environments that include cryogenic temperatures and vacuum and also require effective analytical tools for the design of efficient motors. A finite element analytical model was developed to examine the excitation of flexural plate wave traveling in a piezoelectrically actuated rotary motor. The model uses 3D finite element and equivalent circuit models that are applied to predict the excitation frequency and modal response of the stator. This model incorporates the details of the stator including the teeth, piezoelectric ceramic, geometry, bonding layer, etc. The theoretical predictions were corroborated experimentally for the stator. In parallel, efforts have been made to determine the thermal and vacuum performance of these motors. Experiments have shown that the motor can sustain at least 230 temperature cycles from 0 degree(s)C to -90 degree(s)C at 7 Torr pressure significant performance change. Also, in an earlier study the motor lasted over 334 hours at -150 degree(s)C and vacuum. To explore telerobotic applications for USMs a robotic arm was constructed with such motors.

Citation Download Citation

Yoseph Bar-Cohen, Xiaoqi Bao, and Willem Grandia "Rotary ultrasonic motors actuated by traveling flexural waves", Proc. SPIE 3668, Smart Structures and Materials 1999: Smart Structures and Integrated Systems, (9 June 1999); https://doi.org/10.1117/12.350745

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