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20 July 1999 Design and development of 150-MHz wireless telemetry system for MEMS-IDT-based sensor
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Abstract
The main objective of this paper is to demonstrate the capability of using wireless telemetry system for MEMS-IDT based sensors for sensing of various physical parameters. The system is based on a growing technology in the area of piezoelectric devices such as Surface Acoustic Wave (SAW) Devices. A wireless telemetry system is designed and developed to operate with the MEMS-IDT sensor. A miniature rectangular loop antenna is designed and constructed for integrating directly to the sensor. An impedance matching network is incorporated in the system to match the input and out put impedance and the performance is evaluated. It is observed that an improvement of 15 dB in signal strength due to the impedance matching network. This MEMS-IDT sensor is designed to provide quite complex signal processing functions within a very small package. This creates a great advantage in today's world where reduction in size is of utmost importance. Because SAW devices are most commonly fabricated on semiconductor substrates, microfabrication facilities are ideal for mass production can substantially reduce costs.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. Piscotty, K. A. Jose, Vasundara V. Varadan, and Vijay K. Varadan "Design and development of 150-MHz wireless telemetry system for MEMS-IDT-based sensor", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354262
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