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20 July 1999 Multiregime MEMS sensor networks for smart structures
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Abstract
This paper discusses sensor IC design and packaging approaches, sensor networks architecture and communication protocols, as well as current and future applications of a series of transducers which we have developed in order to address several of the unmet needs of sensing and closed loop control of smart structures and organism-like machines of the future. In particular, the approach described therein has been used to design and manufacture sensors tailored for the measurement of strain, rotation, displacement, pressure, vibration, flow, multi-axis fluid shear, multi-axis strain, tough, multi-axis acceleration, and sound. This paper describes a suite of networkable sensors designed to monitor the internal state of the system, such as strain and joint angle, as well as that of the environment and contact interface with the system, such as pressure, shear stress and contact forces and moments.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephen C. Jacobsen, Brian J. Maclean, Mark R. Whittaker, Marc Olivier, and Mike G. Mladejovsky "Multiregime MEMS sensor networks for smart structures", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354280
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