Advanced negative i-line resist development on metal surfaces for next-generation lithography mask fabrication

Craig L. Ghelli; David P. Mancini; Douglas J. Resnick; Pawitter J. S. Mangat; William J. Dauksher

doi:10.1117/12.351117

25 June 1999 Advanced negative i-line resist development on metal surfaces for next-generation lithography mask fabrication

Craig L. Ghelli, David P. Mancini, Douglas J. Resnick, Pawitter J. S. Mangat, William J. Dauksher

Author Affiliations +

Proceedings Volume 3676, Emerging Lithographic Technologies III; (1999) https://doi.org/10.1117/12.351117
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Development of next generation mask technology requires the use of several different metallic materials. As a result, it is necessary to develop resist processes which offer a combination of good resolution and adhesion for each surface. In this study, Ultra i-300, a high resolution, chemically amplified, negative i-line resist was evaluated for use with several metal substrate materials. The metal films in the evaluation include: Cr, TaSi, TaSiN, and TiW. Early tests with Ultra i-300 using a baseline process optimized for silicon, provide very poor adhesion on these metal films. Several approaches were used to solve this problem including pre-application dehydration bakes, modified processing bakes, surface pretreatments, and use of anti-reflective coatings. Adjustment of the soft bake/post bake temperatures greatly improved adhesion, but resulted in severe standing waves and/or poor processing latitude. Significant improvements were achieved using AR2-600 a DUV anti-reflective coating (ARC) with a modified bake process. This eliminated standing waves, improved adhesion, and provided the best resolution and processing latitude. Other ARCs were also evaluated in an attempt to further optimize the process. Although the goal of this study was to develop a resist process for next generation mask technology, the results are applicable wherever it is desirable to use a negative i-line resists on metallic substrates.

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Craig L. Ghelli, David P. Mancini, Douglas J. Resnick, Pawitter J. S. Mangat, and William J. Dauksher "Advanced negative i-line resist development on metal surfaces for next-generation lithography mask fabrication", Proc. SPIE 3676, Emerging Lithographic Technologies III, (25 June 1999); https://doi.org/10.1117/12.351117

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KEYWORDS

Metals

Extreme ultraviolet lithography

Antireflective coatings

Silicon

Charged-particle lithography

Lithography

Mask making

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