New silica glass for 157-nm lithography

Yoshiaki Ikuta; Shinya Kikugawa; Akio Masui; Noriaki Shimodaira; Shuhei Yoshizawa; Masahiro Hirano

doi:10.1117/12.351160

25 June 1999 New silica glass for 157-nm lithography

Yoshiaki Ikuta, Shinya Kikugawa, Akio Masui, Noriaki Shimodaira, Shuhei Yoshizawa, Masahiro Hirano

Proceedings Volume 3676, Emerging Lithographic Technologies III; (1999) https://doi.org/10.1117/12.351160
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Projection photolithography at 157 nm is now under research as a possible extension of current 248 nm and planned 193 nm technologies. However, the conventional silica glass used for 248 nm and 193 nm lithography cannot be applied for 157 nm lithography because of its low transmittance. In order to develop the modified silica glass for 157 nm lithography, the transmittance in the vacuum-UV region and the optical properties induced by vacuum-UV irradiation were investigated. The OH group and the ODC in the silica glass markedly affect the initial transmittance at 157 nm and the former also affects the resistance to vacuum -UV irradiation. The hydrogen bonded OH group was observed after vacuum-UV irradiation. From these results, the new silica glass 'AQF' for 157 nm lithography has been successfully developed with a high internal transmittance at 157 nm and a excellent resistance to F₂ laser.

Citation Download Citation

Yoshiaki Ikuta, Shinya Kikugawa, Akio Masui, Noriaki Shimodaira, Shuhei Yoshizawa, and Masahiro Hirano "New silica glass for 157-nm lithography", Proc. SPIE 3676, Emerging Lithographic Technologies III, (25 June 1999); https://doi.org/10.1117/12.351160

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available