Efficiency improvements of offline metrology job creation

Victor J. Zuniga; Alan Carlson; John C. Podlesny; Paul C. Knutrud

doi:10.1117/12.350876

14 June 1999 Efficiency improvements of offline metrology job creation

Victor J. Zuniga, Alan Carlson, John C. Podlesny, Paul C. Knutrud

Proceedings Volume 3677, Metrology, Inspection, and Process Control for Microlithography XIII; (1999) https://doi.org/10.1117/12.350876
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Progress of the first lot of a new design through the production line is watched very closely. All performance metrics, cycle-time, in-line measurement results and final electrical performance are critical. Rapid movement of this lot through the line has serious time-to-market implications. Having this material waiting at a metrology operation for an engineer to create a measurement job plan wastes valuable turnaround time. Further, efficient use of a metrology system is compromised by the time required to create and maintain these measurement job plans. Thus, having a method to develop metrology job plans prior to the actual running of the material through the manufacture area can significantly improve both cycle time and overall equipment efficiency. Motorola and Schlumberger have worked together to develop and test such a system. The Remote Job Generator (RJG) created job plans for new device sin a manufacturing process from an NT host or workstation, offline. This increases available system tim effort making production measurements, decreases turnaround time on job plan creation and editing, and improves consistency across job plans. Most importantly this allows job plans for new devices to be available before the first wafers of the device arrive at the tool for measurement. The software also includes a database manager which allows updates of existing job plans to incorporate measurement changes required by process changes or measurement optimization. This paper will review the result of productivity enhancements through the increased metrology utilization and decreased cycle time associated with the use of RJG. Finally, improvements in process control through better control of Job Plans across different devices and layers will be discussed.

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Victor J. Zuniga, Alan Carlson, John C. Podlesny, and Paul C. Knutrud "Efficiency improvements of offline metrology job creation", Proc. SPIE 3677, Metrology, Inspection, and Process Control for Microlithography XIII, (14 June 1999); https://doi.org/10.1117/12.350876

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KEYWORDS

Metrology

Time metrology

Semiconducting wafers

Manufacturing

Measurement devices

Overlay metrology

Control systems

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