Acoustic characterization of TiO2 film for humidity sensors applications

Cinzia Caliendo; Enrico Verona

doi:10.1117/12.341169

10 March 1999 Acoustic characterization of TiO₂ film for humidity sensors applications

Cinzia Caliendo, Enrico Verona

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341169
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

The change in the SAW phase velocity due to the presence of a TiO₂ thin film of the propagation surface of a piezoelectric substrate has been used for the determination of the elastic constant of the layers. The relative change (Delta) v/v in the SAW phase velocity v₀ is expressed, using the perturbation theory, in function of the material density and of the elastic constants of the film. A comparison between the values of (Delta) v/v obtained with exact calculations, the approximate theory and the experimental values allowed us to evaluate the physical constants of TiO₂ films to be used as sensitive membranes in relative humidity sensors applications.

Citation Download Citation

Cinzia Caliendo and Enrico Verona "Acoustic characterization of TiO₂ film for humidity sensors applications", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341169

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