Advanced 3D-CAD interface for micromachining with excimer lasers

Hans Kurt Toenshoff; Ferdinand von Alvensleben; Christian Kulik

doi:10.1117/12.341218

10 March 1999 Advanced 3D-CAD interface for micromachining with excimer lasers

Hans Kurt Toenshoff, Ferdinand von Alvensleben, Christian Kulik

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341218
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Using CAD-CAM software tools in a production chain from the design to the NC code generation and manufacturing of workpieces is state of the art in common technologies such as milling or turning. Today these software tools are equipped with intelligent algorithms consider the characteristics of the respective production technology like e.g. the consideration of different tools to manufacture different volume sizes or the quality of special surface finishes.

Citation Download Citation

Hans Kurt Toenshoff, Ferdinand von Alvensleben, and Christian Kulik "Advanced 3D-CAD interface for micromachining with excimer lasers", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341218

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