Automatic evaluation of a sensor's geometrical parameters

Jean Philippe Blanc; Marc Belleville; Fabien Mieyeville; Hubert Bono

doi:10.1117/12.341244

10 March 1999 Automatic evaluation of a sensor's geometrical parameters

Jean Philippe Blanc, Marc Belleville, Fabien Mieyeville, Hubert Bono

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341244
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

This paper deals with a method aimed to automatically determine the parameters of a sensor in order to reach the end user's functional specifications. This general method, based on a behavioral modeling of the sensor, and on analog simulations and optimizations, has been setup and validated for a capacitive pressure sensor. The tools used are standard Microelectronics IC CAD tools. Four different steps are necessary to reach an optimal set of parameters. Considering a new family of sensor, the first step defines the different types of analog simulations that will allow a good decoupling between the sensor parameters. Next, for every new sensor specification, a first set of simulations is used to get realistic initial values for the main parameters. Then a first optimization, is performed, considering worst-case technological conditions. This method has been validated using two realistic and different functional specifications; the optimization results are in good agreement with the previously manufactured devices.

Citation Download Citation

Jean Philippe Blanc, Marc Belleville, Fabien Mieyeville, and Hubert Bono "Automatic evaluation of a sensor's geometrical parameters", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341244

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